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Development of a powerful vortex stabilized waterwall flash lamp for RTP applications

Thrum, T. C., Dets, D., Hewett, S., Rudic, A., Stuart, I. and Viel, G. C.
2004
Industry Applications Conference, 39th IAS Annual Meeting, vol.2: 1019 - 1023

Thrum, T. C., Dets, D., Hewett, S., Rudic, A., Stuart, I. and Viel, G. C., (2004), "Development of a powerful vortex stabilized waterwall flash lamp for RTP applications", Industry Applications Conference, 39th IAS Annual Meeting, vol.2: 1019 - 1023.
Abstract:
A 300 mm long flash lamp based on a water-vortex stabilized high-pressure high-power arc lamp has been developed to meet future requirements in semiconductor rapid thermal processing. This flash lamp is much more powerful than any other commercially available flash lamp. Typical operating parameters are peak currents of up to 50 kA and pulse widths in the order of 0.5 to 2 ms FWHM.

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Author Information and Other Publications Notes
Thrum, T. C.
  1. Characterizing state-of-the-art solar panels - a new approach for large area testing  
Dets, D.
     
Hewett, S.
     
Rudic, A.
     
Stuart, I.
     
Viel, G. C.
     


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