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Graduate Courses
DESIGN AND FABRICATION OF
MICROMACHINES AND MICROMECHANISMS (ENGR6371)
Introduction to microsystems and devices; mechanical
properties of materials used in microsystems; microfabrication and
post-processing techniques; sacrificial and structural layers;
lithography, deposition and etching;introduction and design of
different types of sensors and actuators; micromotors and other
microdevices; mechanical design, finite element modelling; designand
fabrication of free-standing structures; microbearings; special
techniques:double sided lithography, electrochemical milling, laser
machining, LIGA,influence of IC fabrication methods on mechanical
properties; applicationexamples in biomedical, industrial and space
technology areas; integration,bonding and packaging of MEMS devices.
This course includes a project.
OPTICAL MICROSYSTEMS (MECH
6691)
Microfabrication and micromachining required for
Optical microsystems , An overview;
Optical microsystems modeling, simulation, sensitivity analysis;
Properties of materials suitable for optical MEMS; Measurements,
sensing and actuation suitable for optical microsystems; Introduction
to micro-optical components; Optical waveguide-based systems; Design of
different Optical MEMS devices; Chemical and biochemical sensing with
optical microsystems; Assembly, Packaging and Testing of optical MEMS
devices
AEROELASTICITY (MECH 6481)
Aerodynamic loading of elastic airfoils; phenomenon
of divergence; effect of flexible control surface on divergence of main
structure; divergence of one- and two-dimensional wing models;
phenomenon of flutter; flutter of two- and threedimensional wings;
approximate analysis techniques; flutter prevention and control; panel
flutter in high speed vehicles; flutter of turbomachine bladings;
vortex induced oscillations; bridge buffeting.
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