DESIGN AND FABRICATION OF MICROMACHINES AND MICROMECHANISMS (ENGR6371)
Introduction to microsystems and devices; mechanical properties of materials used in microsystems; microfabrication and post-processing techniques; sacrificial and structural layers; lithography, deposition and etching;introduction and design of different types of sensors and actuators; micromotors and other microdevices; mechanical design, finite element modelling; designand fabrication of free-standing structures; microbearings; special techniques:double sided lithography, electrochemical milling, laser machining, LIGA,influence of IC fabrication methods on mechanical properties; applicationexamples in biomedical, industrial and space technology areas; integration,bonding and packaging of MEMS devices. This course includes a project.
OPTICAL MICROSYSTEMS (MECH 6691)
Microfabrication and micromachining required for Optical microsystems , An overview; Optical microsystems modeling, simulation, sensitivity analysis; Properties of materials suitable for optical MEMS; Measurements, sensing and actuation suitable for optical microsystems; Introduction to micro-optical components; Optical waveguide-based systems; Design of different Optical MEMS devices; Chemical and biochemical sensing with optical microsystems; Assembly, Packaging and Testing of optical MEMS devices
AEROELASTICITY (MECH 6481)
Aerodynamic loading of elastic airfoils; phenomenon of divergence; effect of flexible control surface on divergence of main structure; divergence of one- and two-dimensional wing models; phenomenon of flutter; flutter of two- and threedimensional wings; approximate analysis techniques; flutter prevention and control; panel flutter in high speed vehicles; flutter of turbomachine bladings; vortex induced oscillations; bridge buffeting.