The Optical Bio-Microsystems Laboratory has ConSiM (Concordia Silicon Microfabrication) located in a claean room of 100 sq. m. The support of $1.1M from CFI and Industrial partners is highly acknowledged. The following are some of the equipment and facilities available for Microfabrication and Microlithography:

  • Direct Write Lithography DWL66
  • Plasmalab 80 +ICP65 Deep Reactive Ion Etcher for Silicon and Oxide
  • Plasma Enhanced Chemical Vapour Deposition PECVD DP80 for SiO2,Si3N4, SiON
  • E-Beam Deposition
  • Xenon Difluoride Etching Facility
  • TMAH Etching Setup
  • Wirebonding UV Lithography Setup
  • Edwards Sputter Deposition
  • Excimer Laser 
  • Soft-Lithography on polymers, PDMS, PMMA
  • Nano synthesis
  • NSERC RTI’s equipment: Cantilever Sensing Array, Femto Tools, Cytoviva
  • 3D Printers (FDM and Fromlab)


Experimental and testing facilities at the Optical-Bio Microsystems Laboratory includes, test equipments for different kinds of testing like Optical, Pieze electric Testing, MEMS testing, Microfluidic testing and characterization.

  • Piezoelectric testing facility for PVDF films
  • Fourier Transform Infra-Red Spectroscopy
  • Laser Doppler Velocimetry2,Si3N4, SiON
  • MEMS Mirau Interferometry
  • Flow visualization
  • Particle Tracking Velocimetry
  • Optical MEMS testing
  • Optical-Bio testing facilities for the characterization of Biological molecules
  • UV-Visible Spectrophotometer
  • Polytech Vibrometer
  • Concentris Cantilever sensor array system. Support by Concentris
  • MEMS Dynamic Testing Facility