Facilities
Fabrication
The Optical Bio-Microsystems Laboratory has ConSiM (Concordia Silicon Microfabrication) located in a claean room of 100 sq. m. The support of $1.1M from CFI and Industrial partners is highly acknowledged. The following are some of the equipment and facilities available for Microfabrication and Microlithography:
- Direct Write Lithography DWL66
- Plasmalab 80 +ICP65 Deep Reactive Ion Etcher for Silicon and Oxide
- Plasma Enhanced Chemical Vapour Deposition PECVD DP80 for SiO2,Si3N4, SiON
- E-Beam Deposition
- Xenon Difluoride Etching Facility
- TMAH Etching Setup
- Wirebonding UV Lithography Setup
- Edwards Sputter Deposition
- Excimer Laser
- Soft-Lithography on polymers, PDMS, PMMA
- Nano synthesis
- NSERC RTI’s equipment: Cantilever Sensing Array, Femto Tools, Cytoviva
- 3D Printers (FDM and Fromlab)
Testing
Experimental and testing facilities at the Optical-Bio Microsystems Laboratory includes, test equipments for different kinds of testing like Optical, Pieze electric Testing, MEMS testing, Microfluidic testing and characterization.
- Piezoelectric testing facility for PVDF films
- Fourier Transform Infra-Red Spectroscopy
- Laser Doppler Velocimetry2,Si3N4, SiON
- MEMS Mirau Interferometry
- Flow visualization
- Particle Tracking Velocimetry
- Optical MEMS testing
- Optical-Bio testing facilities for the characterization of Biological molecules
- UV-Visible Spectrophotometer
- Polytech Vibrometer
- Concentris Cantilever sensor array system. Support by Concentris
- MEMS Dynamic Testing Facility